OXIDATION OF SILICON - STRESS-RELAXATION IN SILICA

被引：13

作者：

DOREMUS, RH

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 8A期

关键词：

D O I：

10.1149/1.2100806

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2001 / 2003

页数：3

共 18 条

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[6] ROLE OF STRESS ON THE PARABOLIC KINETIC CONSTANT FOR DRY SILICON OXIDATION [J].

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