OXIDATION OF SILICON BY WATER AND OXYGEN AND DIFFUSION IN FUSED SILICA

被引：101

作者：

DOREMUS, RH ^{[1
]}

机构：

[1] RENSSELAER POLYTECH INST,DEPT MAT ENGN,TROY,NY 12181

来源：

关键词：

D O I：

10.1021/j100557a006

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：1773 / 1775

页数：3

共 14 条

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