DISTRIBUTIONS OF GROWTH-RATES ON PATTERNED SURFACES MEASURED BY SCANNING MICROPROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION

被引：150

作者：

HATA, M

ISU, T

WATANABE, A

KATAYAMA, Y

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 04期

关键词：

D O I：

10.1116/1.584997

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：692 / 696

页数：5

相关论文

共 9 条

[1] REAL-TIME OBSERVATION OF GAAS (001) SURFACES DURING MOLECULAR-BEAM EPITAXY BY SCANNING MICROPROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION
ISU, T
WATANABE, A
HATA, M
KATAYAMA, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (12): : L2259 - L2261
[2] ANISOTROPIC LATERAL GROWTH OF GAAS BY MOLECULAR-BEAM EPITAXY
KAWABE, M
SUGAYA, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (07): : L1077 - L1079
[3] REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION OSCILLATIONS FROM VICINAL SURFACES - A NEW APPROACH TO SURFACE-DIFFUSION MEASUREMENTS
NEAVE, JH
DOBSON, PJ
JOYCE, BA
ZHANG, J
[J]. APPLIED PHYSICS LETTERS, 1985, 47 (02) : 100 - 102
[4] DYNAMICS OF FILM GROWTH OF GAAS BY MBE FROM RHEED OBSERVATIONS
NEAVE, JH
JOYCE, BA
DOBSON, PJ
NORTON, N
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 31 (01): : 1 - 8
[5] NILSSON S, 1989, APPL PHYS LETT, V55, P92
[6] ANISOTROPIC SURFACE MIGRATION OF GA ATOMS ON GAAS(001)
OHTA, K
KOJIMA, T
NAKAGAWA, T
[J]. JOURNAL OF CRYSTAL GROWTH, 1989, 95 (1-4) : 71 - 74
[7] GROWTH OF GAAS-GA1-XALXAS OVER PREFERENTIALLY ETCHED CHANNELS BY MOLECULAR-BEAM EPITAXY - TECHNIQUE FOR 2-DIMENSIONAL THIN-FILM DEFINITION
TSANG, WT
CHO, AY
[J]. APPLIED PHYSICS LETTERS, 1977, 30 (06) : 293 - 296
[8] SPONTANEOUS GROWTH OF COHERENT TILTED SUPERLATTICE ON VICINAL (100) GAAS SUBSTRATES
TSUCHIYA, M
PETROFF, PM
COLDREN, LA
[J]. APPLIED PHYSICS LETTERS, 1989, 54 (17) : 1690 - 1692
[9] REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION MEASUREMENT OF SURFACE-DIFFUSION DURING THE GROWTH OF GALLIUM-ARSENIDE BY MBE
VANHOVE, JM
COHEN, PI
[J]. JOURNAL OF CRYSTAL GROWTH, 1987, 81 (1-4) : 13 - 18