A METHOD FOR DETERMINING THE MASS THICKNESS OF THIN-FILMS USING ELECTRON-PROBE MICROANALYSIS

被引：22

作者：

AUGUST, HJ ^{[1
]}

WERNISCH, J ^{[1
]}

机构：

[1] TECH UNIV WIEN,INST ANGEW & TECH PHYS,KARLSPL 13,A-1030 WIEN,AUSTRIA

来源：

SCANNING | 1987年 / 9卷 / 04期

关键词：

D O I：

10.1002/sca.4950090403

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：145 / 155

页数：11

共 24 条

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KYSER, DF ;

MURATA, K .

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COX, MG ;

SCOTT, VD .

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[15]

MARSHALL DJ, 1966, 4 INT C XRAY OPT MIC, P374

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PICHOIR, F .

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[17]

POUCHOU JL, 1985, J MICROSC SPECT ELEC, V10, P279

[18]

POUCHOU JL, 1984, J MICROSC SPECT ELEC, V9, P99

[19]

POUCHOU JL, 1984, RECH AEROSPATIALE, P349

[20] X-RAY PRODUCTION RANGE IN SOLIDS BY 2-15-KEV ELECTRONS [J].

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