THE IMPACT OF N- DRAIN LENGTH AND GATE DRAIN SOURCE OVERLAP ON SUBMICROMETER LDD DEVICES FOR VLSI

被引:15
作者
IZAWA, R
TAKEDA, E
机构
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D O I
10.1109/EDL.1987.26701
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:480 / 482
页数:3
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