INSTRUMENT FOR RAPID DETERMINATION OF SEMICONDUCTOR IMPURITY PROFILES

被引:40
作者
BAXANDALL, PJ
COLLIVER, DJ
FRAY, AF
机构
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1971年 / 4卷 / 03期
关键词
D O I
10.1088/0022-3735/4/3/014
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:213 / +
页数:1
相关论文
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