MICROMACHINED SILICON CANTILEVERS AND TIPS FOR BIDIRECTIONAL FORCE MICROSCOPY

被引：10

作者：

BUSER, RA

BRUGGER, J

DEROOIJ, NF

机构：

[1] Institute of Microtechnology, University of Neuchâtel, CH-2000 Neuchâtel

来源：

ULTRAMICROSCOPY | 1992年 / 42卷

关键词：

D O I：

10.1016/0304-3991(92)90469-Z

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A monocrystalline silicon lever with an integrated silicon tip for a force/friction microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.

引用

页码：1476 / 1480

页数：5

共 19 条

[1] NEW SCANNING TUNNELING MICROSCOPY TIP FOR MEASURING SURFACE-TOPOGRAPHY
AKAMA, Y
NISHIMURA, E
SAKAI, A
MURAKAMI, H
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (01): : 429 - 433
[2] MICROFABRICATION OF CANTILEVER STYLI FOR THE ATOMIC FORCE MICROSCOPE
ALBRECHT, TR
AKAMINE, S
CARVER, TE
QUATE, CF
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04): : 3386 - 3396
[3] ALLEN PC, 1989, I PHYS C SER, V99, P17
[4] BUSER R, 1989, THESIS U NEUCHATEL
[5] VERY HIGH Q-FACTOR RESONATORS IN MONOCRYSTALLINE SILICON
BUSER, RA
DEROOIJ, NF
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) : 323 - 327
[6] GIMZEWSKI J, Patent No. 851022554
[7] KENNY TW, 1990, FEB P IEEE MICR EL S, P192
[8] KONG LC, 1990, JUN IEEE SOL STAT SE, P28
[9] LINDER C, TRANSDUCERS 91
[10] Combined scanning force and friction microscopy of mica
Marti, O.
Colchero, J.
Mlynek, J.
[J]. Nanotechnology, 1990, 1 (02) : 141 - 144

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