SOFT-X-RAY PROJECTION LITHOGRAPHY EXPERIMENTS USING SCHWARZSCHILD IMAGING OPTICS

被引：13

作者：

TICHENOR, DA

KUBIAK, GD

MALINOWSKI, ME

STULEN, RH

HANEY, SJ

BERGER, KW

BROWN, LA

SWEATT, WC

BJORKHOLM, JE

FREEMAN, RR

HIMEL, MD

MACDOWELL, AA

TENNANT, DM

WOOD, OR

BOKOR, J

JEWELL, TE

MANSFIELD, WM

WASKIEWICZ, WK

WHITE, DL

WINDT, DL

机构：

[1] SANDIA NATL LABS, ALBUQUERQUE, NM 87185 USA

[2] AT&T BELL LABS, HOLMDEL, NJ 07733 USA

来源：

APPLIED OPTICS | 1993年 / 32卷 / 34期

关键词：

SOFT X-RAY; IMAGING; REFLECTIVE OPTICS; MULTILAYER; LITHOGRAPHYS;

D O I：

10.1364/AO.32.007068

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new Schwarzschild housing, designed for improved alignment stability, is described.

引用

页码：7068 / 7071

页数：4

共 4 条

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BERGER, KW ;

BROWN, LA ;