STRESS-DISTRIBUTION IN RELEASED VACUUM-DEPOSITED ALUMINUM FILMS

被引：7

作者：

VANOPDORP, C

VERKERK, MJ

机构：

来源：

关键词：

D O I：

10.1063/1.339935

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1518 / 1525

页数：8

共 32 条

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