INTERNAL-STRESS AND STRUCTURE OF EVAPORATED CHROMIUM AND MGF2 FILMS AND THEIR DEPENDENCE ON SUBSTRATE-TEMPERATURE

被引：32

作者：

ABERMANN, R

MARTINZ, HP

机构：

来源：

THIN SOLID FILMS | 1984年 / 115卷 / 03期

关键词：

D O I：

10.1016/0040-6090(84)90179-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：185 / 194

页数：10

共 18 条

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