INTERNAL-STRESS, YOUNGS MODULUS AND ADHESION OF VACUUM-DEPOSITED MGF2 FILMS

被引：8

作者：

KINBARA, A

BABA, S

MATUDA, N

SATO, K

机构：

来源：

THIN SOLID FILMS | 1982年 / 96卷 / 02期

关键词：

D O I：

10.1016/0040-6090(82)90614-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：155 / 159

页数：5

相关论文

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[5] YOUNGS MODULI OF VACUUM-DEPOSITED SILVER FILMS [J].

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