IMPLICATIONS OF BROAD RAMAN-SPECTRA OF SPUTTERED SIGE ALLOY-FILMS

被引：5

作者：

HAYASHI, S ^{[1
]}

FUJII, M ^{[1
]}

TAKANABE, T ^{[1
]}

YAMAMOTO, K ^{[1
]}

机构：

[1] KOBE UNIV, FAC ENGN, DEPT ELECTR ENGN, KOBE 657, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 07期

关键词：

D O I：

10.1143/JJAP.27.L1165

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1165 / L1167

页数：3

共 16 条

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