HIGH-RESOLUTION ELECTRON-MICROSCOPIC STUDIES OF AMORPHOUS SIO FILM

被引：42

作者：

KAITO, C

SHIMIZU, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1984年 / 23卷 / 01期

关键词：

D O I：

10.1143/JJAP.23.L7

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L7 / L8

页数：2

共 8 条

[1] STRUCTURE OF SILICON OXIDE FILMS
COLEMAN, MV
THOMAS, DJD
[J]. PHYSICA STATUS SOLIDI, 1967, 22 (02): : 593 - &
[2] FRANK J, 1973, OPTIK, V38, P513
[3] JAMES RW, 1965, OPTICAL PRINCIPLES D, P513
[4] HIGH-RESOLUTION ELECTRON-MICROSCOPIC STUDIES OF CRYSTALLOGRAPHIC SHEAR STRUCTURES IN REDUCED RUTILE CRYSTALS
KAITO, C
IWANISHI, M
HARADA, T
MIYANO, T
SHIOJIRI, M
[J]. TRANSACTIONS OF THE JAPAN INSTITUTE OF METALS, 1983, 24 (06): : 450 - 460
[5] THE THEORETICAL RESOLUTION LIMIT OF THE ELECTRON MICROSCOPE
SCHERZER, O
[J]. JOURNAL OF APPLIED PHYSICS, 1949, 20 (01) : 20 - 29
[6] ELECTRON-MICROSCOPIC STUDIES OF STRUCTURE AND CRYSTALLIZATION OF AMORPHOUS METAL-OXIDE FILMS
SHIOJIRI, M
MIYANO, T
KAITO, C
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1979, 18 (10) : 1937 - 1945
[7] STRUCTURE AND CRYSTALLIZATION OF VERY THIN AMORPHOUS WO3 FILMS
SHIOJIRI, M
MIYANO, T
KAITO, C
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (03) : 567 - 568
[8] HIGH-RESOLUTION ELECTRON-MICROSCOPY OF AMORPHOUS-LIKE TITANIUM-OXIDE FILMS
YAMADA, Y
YOSHIDA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (04): : 759 - 759