ISOTOPIC HYDROGEN-EXCHANGE STUDIES OF THE A-SI-H SURFACE DURING GROWTH

被引:1
作者
ABELSON, JR [1 ]
MANDRELL, L [1 ]
DOYLE, JR [1 ]
MYERS, A [1 ]
MALEY, N [1 ]
机构
[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
关键词
D O I
10.1016/0022-3093(89)90107-5
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:184 / 186
页数:3
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    HE, MZ
    GALLAGHER, A
    [J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (01) : 188 - 194
  • [2] HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED BY REACTIVE SPUTTERING - THE ELECTRONIC-PROPERTIES, HYDROGEN-BONDING AND MICROSTRUCTURE
    PINARBASI, M
    MALEY, N
    MYERS, A
    ABELSON, JR
    [J]. THIN SOLID FILMS, 1989, 171 (01) : 217 - 233