CHARACTERIZATION OF POLYCRYSTALLINE DIAMOND THIN-FILMS GROWN ON VARIOUS SUBSTRATES

被引：25

作者：

RAMESHAM, R ^{[1
]}

ROPPEL, T ^{[1
]}

JOHNSON, RW ^{[1
]}

CHANG, JM ^{[1
]}

机构：

[1] UNIV ALABAMA,DEPT CHEM,HUNTSVILLE,AL 35899

来源：

THIN SOLID FILMS | 1992年 / 212卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90505-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Polycrystalline diamond thin films have been selectively grown on various substrates such as silicon, silicon nitride, silicon dioxide, alumina, molybdenum, and boron nitride. This has been achieved by selectively damaging the substrate by an ultrasonic agitation process using diamond particles (typical size approximately 90-mu-m) in methanol. Microwave plasma-assisted chemical vapor deposition is used to grow diamond thin films using a gas mixture of hydrogen and methane. The films were analyzed for morphology by scanning electron microscopy, chemical nature by Raman spectroscopy, and adhesion strength by z-axis pull stud testing. Films grown on boron nitride were characterized by X-ray diffraction.

引用

页码：96 / 103

页数：8

共 13 条

[1] ALAM M, 1991, SPR EL SOC M, V91, P151
[2] SELECTIVE DEPOSITION OF DIAMOND FILMS
DAVIDSON, JL
ELLIS, C
RAMESHAM, R
[J]. JOURNAL OF ELECTRONIC MATERIALS, 1989, 18 (06) : 711 - 715
[3] KNIGHT DS, 1988, DIAMOND DIAMOND LIKE, P73
[4] EPITAXIAL-GROWTH OF DIAMOND THIN-FILMS ON CUBIC BORON NITRIDE(111) SURFACES BY DC PLASMA CHEMICAL VAPOR-DEPOSITION
KOIZUMI, S
MURAKAMI, T
INUZUKA, T
SUZUKI, K
[J]. APPLIED PHYSICS LETTERS, 1990, 57 (06) : 563 - 565
[5] ADHESION AND TRIBOLOGICAL PROPERTIES OF DIAMOND FILMS ON VARIOUS SUBSTRATES
KUO, CT
YEN, TY
HUANG, TH
HSU, SE
[J]. JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) : 2515 - 2523
[6] VAPOR-DEPOSITION OF DIAMOND THIN-FILMS ON VARIOUS SUBSTRATES
LEE, YH
BACHMANN, KJ
GLASS, JT
LEGRICE, YM
NEMANICH, RJ
[J]. APPLIED PHYSICS LETTERS, 1990, 57 (18) : 1916 - 1918
[7] LEWUS MO, 1989, TECHNOLOGY UPDATE DI, P127
[8] ANALYTICAL AND MECHANICAL EVALUATION OF DIAMOND FILMS ON SILICON
PEEBLES, DE
POPE, LE
[J]. JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) : 2589 - 2598
[9] SELECTIVE AND LOW-TEMPERATURE SYNTHESIS OF POLYCRYSTALLINE DIAMOND
RAMESHAM, R
ROPPEL, T
ELLIS, C
JAWORSKE, DA
BAUGH, W
[J]. JOURNAL OF MATERIALS RESEARCH, 1991, 6 (06) : 1278 - 1286
[10] RAMESHAM R, 1992, IN PRESS 1991 SPRING

← 1 2 →