2-WAVELENGTH SINUSOIDAL PHASE MODULATING LASER-DIODE INTERFEROMETER INSENSITIVE TO EXTERNAL DISTURBANCES

被引：52

作者：

SASAKI, O

SASAZAKI, H

SUZUKI, T

机构：

[1] Niigata University, Faculty of Engineering, Niigata-Shi

来源：

APPLIED OPTICS | 1991年 / 30卷 / 28期

关键词：

D O I：

10.1364/AO.30.004040

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe a two-wavelength laser-diode interferometer that is insensitive to external disturbances such as fluctuations in the wavelength of the laser diode and mechanical vibrations of the optical components. In sinusoidal phase-modulating interferometry this insensitivity is easily obtained by controlling the injection current of the laser diode with a feedback control system. Using an equivalent wavelength of 152-mu-m provided by two single-frequency laser diodes, we can measure the distance, rotation angle, and surface profile measurements with great accuracy.

引用

页码：4040 / 4045

页数：6

共 7 条

[1] 2-WAVELENGTH SCANNING SPOT INTERFEROMETER USING SINGLE-FREQUENCY DIODE-LASERS [J].