ELECTRON-BEAM AND PHOTOLITHOGRAPHIC FABRICATION OF GUIDED-WAVE OPTICAL COMPONENTS

被引：6

作者：

AAGARD, RL ^{[1
]}

SHEPHERD, LT ^{[1
]}

ULMER, RP ^{[1
]}

机构：

[1] HONEYWELL INC,RES CTR,BLOOMINGTON,MN 55420

来源：

JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 10期

关键词：

D O I：

10.1063/1.323450

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4149 / 4151

页数：3

共 9 条

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[2] 3-LAYER OPTICAL-WAVEGUIDE FOR PHOTOLITHOGRAPHIC FABRICATION OF THIN-FILM LENSES [J].

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[3] NEW UNDERCUTTING PHENOMENON IN PLASMA ETCHING [J].

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[4]

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[5] INTEGRATED OPTICAL PHOTODETECTOR [J].

OSTROWSKY, DB ;

POIRIER, R ;

REIBER, LM ;

DEVERDUN, C .

APPLIED PHYSICS LETTERS, 1973, 22 (09) :463-464

[6] OPTICAL SURFACE WAVES ON THIN FILMS AND THEIR APPLICATION TO INTEGRATED DATA PROCESSORS [J].

SHUBERT, R ;

HARRIS, JH .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1968, MT16 (12) :1048-&

[7] NOVEL METAL-CLAD OPTICAL COMPONENTS AND METHOD OF ISOLATING HIGH-INDEX SUBSTRATES FOR FORMING INTEGRATED OPTICAL CIRCUITS [J].

TIEN, PK ;

MARTIN, RJ ;

RIVASANSEVERINO, S .

APPLIED PHYSICS LETTERS, 1975, 27 (04) :251-253

[8] FOCAL PROPERTIES OF GEODESIC WAVEGUIDE LENSES [J].

VERBER, CM ;

VAHEY, DW ;

WOOD, VE .

APPLIED PHYSICS LETTERS, 1976, 28 (09) :514-516

[9]

WILLE DA, 1974, APPL PHYS LETT, V24, P150

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