TUNABLE MICROMACHINED VERTICAL-CAVITY SURFACE-EMITTING LASER

被引：107

作者：

WU, MS

VAIL, EC

LI, GS

YUEN, W

CHANGHASNAIN, CJ

机构：

[1] E.L. Ginzton Laboratory, Stanford University, CA 94305-4090, Stanford

来源：

ELECTRONICS LETTERS | 1995年 / 31卷 / 19期

关键词：

MICROMACHINING; VERTICAL CAVITY SURFACE EMITTING LASERS;

D O I：

10.1049/el:19951159

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A tunable vertical cavity surface emitting laser with a record 15 nm wavelength tuning for an applied voltage of only 5.7 V is reported. Both red and blue shift are obtained. The device uses a micromachined cantilever to freely suspend a portion of the upper mirror reflector. The cantilever may be electrostatically deflected towards the substrate, to tune the resonant wavelength of the laser microcavity.

引用

收藏

页码：1671 / 1672

页数：2

相关论文

共 9 条

[1] MONOLITHICALLY PELTIER-COOLED VERTICAL-CAVITY SURFACE-EMITTING LASERS [J].

BERGER, PR ;

DUTTA, NK ;

CHOQUETTE, KD ;

HASNAIN, G ;

CHAND, N .

APPLIED PHYSICS LETTERS, 1991, 59 (01) :117-119

[2] CONTINUOUS WAVELENGTH TUNING OF 2-ELECTRODE VERTICAL CAVITY SURFACE EMITTING LASERS [J].

CHANGHASNAIN, CJ ;

HARBISON, JP ;

ZAH, CE ;

FLOREZ, LT ;

ANDREADAKIS, NC .

ELECTRONICS LETTERS, 1991, 27 (11) :1002-1003

[3] 10.1-NM RANGE CONTINUOUS WAVELENGTH-TUNABLE VERTICAL-CAVITY SURFACE-EMITTING LASERS [J].

FAN, L ;

WU, MC ;

LEE, HC ;

GRODZINSKI, P .

ELECTRONICS LETTERS, 1994, 30 (17) :1409-1410

[4] FREQUENCY TUNING OF A DOUBLE-HETEROJUNCTION ALGAAS/GAAS-VERTICAL-CAVITY SURFACE-EMITTING LASER BY A SERIAL INTEGRATED IN-CAVITY MODULATOR DIODE [J].

GMACHL, C ;

KOCK, A ;

ROSENBERGER, M ;

GORNIK, E ;

MICOVIC, M ;

WALKER, JF .

APPLIED PHYSICS LETTERS, 1993, 62 (03) :219-221

[5]

LARSON MC, 1995, MAY C LAS EL BALT

[6] GAAS MICROMACHINED WIDELY TUNABLE FABRY-PEROT FILTERS [J].

VAIL, EC ;

WU, MS ;

LI, GS ;

ENG, L ;

CHANGHASNAIN, CJ .

ELECTRONICS LETTERS, 1995, 31 (03) :228-229

[7]

VAIL EC, 1995, FEB OPT FIB COMM C S

[8] 40 ANGSTROM CONTINUOUS TUNING OF A GAINASP/INP VERTICAL-CAVITY SURFACE-EMITTING LASER USING AN EXTERNAL MIRROR [J].

YOKOUCHI, N ;

MIYAMOTO, T ;

UCHIDA, T ;

INABA, Y ;

KOYAMA, F ;

IGA, K .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1992, 4 (07) :701-703

[9]

Yokouchi N., 1990, Transactions of the Institute of Electronics, Information and Communication Engineers E, VE73, P1473