DYNAMIC STUDY OF ION ETCHING IN A HIGH-RESOLUTION SEM

被引：7

作者：

LEWIS, GW

COLLIGON, JS

NOBES, MJ

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1980年 / 15卷 / 03期

关键词：

D O I：

10.1007/BF00551734

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：681 / 684

页数：4

共 13 条

[1] PREDICTION OF ION-BOMBARDED SURFACE TOPOGRAPHIES USING FRANKS KINEMATIC THEORY OF CRYSTAL DISSOLUTION [J].

BARBER, DJ ;

FRANK, FC ;

MOSS, M ;

STEEDS, JW ;

TSONG, IST .

JOURNAL OF MATERIALS SCIENCE, 1973, 8 (07) :1030-1040

[2] EQUILIBRIUM TOPOGRAPHY OF SPUTTERED AMORPHOUS SOLIDS .2. [J].

CARTER, G ;

COLLIGON, JS ;

NOBES, MJ .

JOURNAL OF MATERIALS SCIENCE, 1971, 6 (02) :115-&

[3] APPLICATION OF EROSION SLOWNESS THEORY TO PREDICTION OF SURFACE CONTOUR GENERATION DURING PARTICULATE ABLATION OF SOLIDS [J].

CARTER, G ;

NOBES, MJ ;

ARSHAK, KI .

WEAR, 1979, 53 (02) :245-261

[4] INFLUENCE OF SURFACE-DIFFUSION ON TOPOGRAPHY DEVELOPMENT OF AN AMORPHOUS SOLID DURING SPUTTERING [J].

CARTER, G .

JOURNAL OF MATERIALS SCIENCE, 1976, 11 (06) :1091-1098

[5]

CARTER G, 1978, J MATER SCI, V13

[6] EQUILIBRIUM TOPOGRAPHY OF SPUTTERED AMORPHOUS SOLIDS .3. COMPUTER SIMULATION [J].

CATANA, C ;

CARTER, G ;

COLLIGON, JS .

JOURNAL OF MATERIALS SCIENCE, 1972, 7 (04) :467-&

[7] INSITU ION ETCHING IN A SCANNING ELECTRON-MICROSCOPE [J].

DHARIWAL, RS ;

FITCH, RK .

JOURNAL OF MATERIALS SCIENCE, 1977, 12 (06) :1225-1232

[8] DEVELOPMENT OF A GENERAL SURFACE CONTOUR BY ION EROSION - THEORY AND COMPUTER-SIMULATION [J].

DUCOMMUN, JP ;

CANTAGREL, M ;

MARCHAL, M .

JOURNAL OF MATERIALS SCIENCE, 1974, 9 (05) :725-736

[9]

FITCH RK, 1970, J PHYS D, V3, P1339

[10] A CHARGED PARTICLE OSCILLATOR [J].

MCILRAITH, AH .

NATURE, 1966, 212 (5069) :1422-+

← 1 2 →