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NEW MODEL OF ELECTRON FREE-PATH IN MULTIPLE LAYERS FOR MONTE-CARLO SIMULATION
被引:39
作者
:
HORIGUCHI, S
论文数:
0
引用数:
0
h-index:
0
HORIGUCHI, S
SUZUKI, M
论文数:
0
引用数:
0
h-index:
0
SUZUKI, M
KOBAYASHI, T
论文数:
0
引用数:
0
h-index:
0
KOBAYASHI, T
YOSHINO, H
论文数:
0
引用数:
0
h-index:
0
YOSHINO, H
SAKAKIBARA, Y
论文数:
0
引用数:
0
h-index:
0
SAKAKIBARA, Y
机构
:
来源
:
APPLIED PHYSICS LETTERS
|
1981年
/ 39卷
/ 06期
关键词
:
D O I
:
10.1063/1.92785
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:512 / 514
页数:3
相关论文
共 7 条
[1]
ENERGY DISSIPATION IN A THIN POLYMER FILM BY ELECTRON-BEAM SCATTERING
HAWRYLUK, RJ
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0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
HAWRYLUK, RJ
HAWRYLUK, AM
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0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
HAWRYLUK, AM
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
SMITH, HI
[J].
JOURNAL OF APPLIED PHYSICS,
1974,
45
(06)
: 2551
-
2566
[2]
CHLOROMETHYLATED POLYSTYRENE AS A DRY ETCHING-RESISTANT NEGATIVE RESIST FOR SUB-MICRON TECHNOLOGY
IMAMURA, S
论文数:
0
引用数:
0
h-index:
0
机构:
Nippon Telegraph and Telephone Public Corporation, Ibaraki Electrical Communication Laboratory, Tokai, Ibaraki
IMAMURA, S
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1979,
126
(09)
: 1628
-
1630
[3]
QUANTITATIVE ELECTRON-MICROPROBE ANALYSIS OF THIN-FILMS ON SUBSTRATES
KYSER, DF
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,RES LAB,MONTEREY & COTTLE RD,SAN JOSE,CA 95193
KYSER, DF
MURATA, K
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引用数:
0
h-index:
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IBM CORP,RES LAB,MONTEREY & COTTLE RD,SAN JOSE,CA 95193
MURATA, K
[J].
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1974,
18
(04)
: 352
-
363
[4]
MONTE-CARLO SIMULATION OF SPATIALLY DISTRIBUTED BEAMS IN ELECTRON-BEAM LITHOGRAPHY
KYSER, DF
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0
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0
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机构:
IBM CORP,RES DIV,SAN JOSE,CA 95193
KYSER, DF
VISWANATHAN, NS
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0
引用数:
0
h-index:
0
机构:
IBM CORP,RES DIV,SAN JOSE,CA 95193
VISWANATHAN, NS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
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(06):
: 1305
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1308
[5]
3-DIMENSIONAL STUDY OF ABSORBED ENERGY DENSITY IN ELECTRON-RESIST FILMS ON SUBSTRATES
MURATA, K
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
MURATA, K
NOMURA, E
论文数:
0
引用数:
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机构:
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
NOMURA, E
NAGAMI, K
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MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
NAGAMI, K
KATO, T
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0
机构:
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
KATO, T
NAKATA, H
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MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
NAKATA, H
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS,
1978,
17
(10)
: 1851
-
1860
[6]
MONTE CARLO CALCULATIONS ON ELECTRON SCATTERING IN A SOLID TARGET
MURATA, K
论文数:
0
引用数:
0
h-index:
0
MURATA, K
MATSUKAWA, T
论文数:
0
引用数:
0
h-index:
0
MATSUKAWA, T
SHIMIZU, R
论文数:
0
引用数:
0
h-index:
0
SHIMIZU, R
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS,
1971,
10
(06)
: 678
-
+
[7]
ENERGY DEPOSITION FUNCTIONS IN ELECTRON RESIST FILMS ON SUBSTRATES
PARIKH, M
论文数:
0
引用数:
0
h-index:
0
机构:
IBM Research Laboratory, San Jose
PARIKH, M
KYSER, DF
论文数:
0
引用数:
0
h-index:
0
机构:
IBM Research Laboratory, San Jose
KYSER, DF
[J].
JOURNAL OF APPLIED PHYSICS,
1979,
50
(02)
: 1104
-
1111
←
1
→
共 7 条
[1]
ENERGY DISSIPATION IN A THIN POLYMER FILM BY ELECTRON-BEAM SCATTERING
HAWRYLUK, RJ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
HAWRYLUK, RJ
HAWRYLUK, AM
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
HAWRYLUK, AM
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
SMITH, HI
[J].
JOURNAL OF APPLIED PHYSICS,
1974,
45
(06)
: 2551
-
2566
[2]
CHLOROMETHYLATED POLYSTYRENE AS A DRY ETCHING-RESISTANT NEGATIVE RESIST FOR SUB-MICRON TECHNOLOGY
IMAMURA, S
论文数:
0
引用数:
0
h-index:
0
机构:
Nippon Telegraph and Telephone Public Corporation, Ibaraki Electrical Communication Laboratory, Tokai, Ibaraki
IMAMURA, S
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1979,
126
(09)
: 1628
-
1630
[3]
QUANTITATIVE ELECTRON-MICROPROBE ANALYSIS OF THIN-FILMS ON SUBSTRATES
KYSER, DF
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,RES LAB,MONTEREY & COTTLE RD,SAN JOSE,CA 95193
KYSER, DF
MURATA, K
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,RES LAB,MONTEREY & COTTLE RD,SAN JOSE,CA 95193
MURATA, K
[J].
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1974,
18
(04)
: 352
-
363
[4]
MONTE-CARLO SIMULATION OF SPATIALLY DISTRIBUTED BEAMS IN ELECTRON-BEAM LITHOGRAPHY
KYSER, DF
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,RES DIV,SAN JOSE,CA 95193
KYSER, DF
VISWANATHAN, NS
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,RES DIV,SAN JOSE,CA 95193
VISWANATHAN, NS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1975,
12
(06):
: 1305
-
1308
[5]
3-DIMENSIONAL STUDY OF ABSORBED ENERGY DENSITY IN ELECTRON-RESIST FILMS ON SUBSTRATES
MURATA, K
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
MURATA, K
NOMURA, E
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
NOMURA, E
NAGAMI, K
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
NAGAMI, K
KATO, T
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
KATO, T
NAKATA, H
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
MITSUBISHI ELECT CORP,LSI DEV LAB,ITAMI,HYOGO,JAPAN
NAKATA, H
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS,
1978,
17
(10)
: 1851
-
1860
[6]
MONTE CARLO CALCULATIONS ON ELECTRON SCATTERING IN A SOLID TARGET
MURATA, K
论文数:
0
引用数:
0
h-index:
0
MURATA, K
MATSUKAWA, T
论文数:
0
引用数:
0
h-index:
0
MATSUKAWA, T
SHIMIZU, R
论文数:
0
引用数:
0
h-index:
0
SHIMIZU, R
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS,
1971,
10
(06)
: 678
-
+
[7]
ENERGY DEPOSITION FUNCTIONS IN ELECTRON RESIST FILMS ON SUBSTRATES
PARIKH, M
论文数:
0
引用数:
0
h-index:
0
机构:
IBM Research Laboratory, San Jose
PARIKH, M
KYSER, DF
论文数:
0
引用数:
0
h-index:
0
机构:
IBM Research Laboratory, San Jose
KYSER, DF
[J].
JOURNAL OF APPLIED PHYSICS,
1979,
50
(02)
: 1104
-
1111
←
1
→