TETRAGONAL ZIRCONIA GROWTH BY NANOLAMINATE FORMATION

被引：50

作者：

SCANLAN, CM ^{[1
]}

GAJDARDZISKAJOSIFOVSKA, M ^{[1
]}

AITA, CR ^{[1
]}

机构：

[1] UNIV WISCONSIN,SURFACE STUDIES LAB,MILWAUKEE,WI 53201

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 26期

关键词：

D O I：

10.1063/1.111220

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Multilayer films of polycrystalline zirconia and amorphous alumina were grown by reactive sputter deposition and characterized using x-ray diffraction and high resolution electron microscopy. We demonstrate that the layer spacing can be scaled to insure nanosize crystallites in the zirconia layer. The result is that nanolaminates with a high volume fraction of retained tetragonal zirconia are produced, independent of deposition parameters and without the addition of a stabilizing dopant.

引用

页码：3548 / 3550

页数：3

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