CHANGES IN STRUCTURE AND MAGNETIC-PROPERTIES OF CO-CR FILMS BY OBLIQUE INCIDENT OF SPUTTERED PARTICLES

被引：5

作者：

HOSHI, Y ^{[1
]}

NAOE, M ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,MEGURO KU,TOKYO 152,JAPAN

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1988年 / 24卷 / 06期

关键词：

D O I：

10.1109/20.92319

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3015 / 3017

页数：3

共 7 条

[1] COMPUTER-SIMULATION OF AMORPHOUS THIN-FILMS OF HARD SPHERES [J].

KIM, S ;

HENDERSON, DJ ;

CHAUDHARI, P .

THIN SOLID FILMS, 1977, 47 (02) :155-158

[2]

MATSUOKA M, 1984, J IECE JAPAN C, V67, P254

[3] COCR-SPUTTERING IN LARGE-SCALE ROLL COATING SYSTEMS [J].

MAYR, M ;

LUDWIG, R ;

KASTNER, K ;

KUKLA, R ;

DALMANN, B ;

HABERKORN, H ;

HITZFELD, M .

IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) :2049-2051

[4] THE EFFECTS OF INCIDENT ANGLE ON C-AXIS ORIENTATION IN SPUTTERED CO-CR FILMS [J].

NIIMURA, Y ;

NAKAGAWA, S ;

NAOE, M .

IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) :2043-2045

[5] PROPERTIES OF HIGH-RATE SPUTTERED PERPENDICULAR RECORDING MEDIA [J].

OUCHI, K ;

IWASAKI, S .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) :4013-4015

[6] CO-CR PERPENDICULAR MAGNETIC RECORDING TAPE BY VACUUM DEPOSITION [J].

SUGITA, R .

IEEE TRANSACTIONS ON MAGNETICS, 1984, 20 (05) :687-692

[7] INCLINING COLUMNAR STRUCTURE IN CO-CR FILMS PREPARED BY ROLL MAGNETRON SPUTTERING [J].

TANAKA, Y ;

ITO, H ;

SONODA, T ;

NISHIKAWA, R .

IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) :2046-2048

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