PROCESS-CONTROL FOR THE FORMATION OF FINE SIC POWDERS IN THERMAL PLASMA FLAME

被引:5
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EGUCHI, K
KO, IY
SUGAWARA, T
LEE, HJ
YOSHIDA, T
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10.2320/jinstmet1952.53.12_1236
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页码:1236 / 1241
页数:6
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共 5 条
[1]   RF-PLASMA SYSTEM FOR THE PRODUCTION OF ULTRAFINE, ULTRAPURE SILICON-CARBIDE POWDER [J].
HOLLABAUGH, CM ;
HULL, DE ;
NEWKIRK, LR ;
PETROVIC, JJ .
JOURNAL OF MATERIALS SCIENCE, 1983, 18 (11) :3190-3194
[2]  
SUYAMA Y, 1985, AM CERAM SOC BULL, V64, P1356
[3]  
VOGT GT, 1984, MATER RES SOC S P, V30, P283
[4]   CHARACTERIZATION OF A HYBRID PLASMA AND ITS APPLICATION TO A CHEMICAL SYNTHESIS [J].
YOSHIDA, T ;
TANI, T ;
NISHIMURA, H ;
AKASHI, K .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (02) :640-646
[5]  
YOSHIDA T, 1985, 8TH P INT C VAC MET, P437