IR-LASER CVD OF TIB2, TICX AND TICXNY COATINGS ON CARBON-FIBERS

被引：23

作者：

HOPFE, V

TEHEL, A

BAIER, A

SCHARSIG, J

机构：

[1] Fachbereich Chemie, Technische Universität Chemnitz, 9010 Chemnitz, PF 964, O

来源：

APPLIED SURFACE SCIENCE | 1992年 / 54卷

关键词：

D O I：

10.1016/0169-4332(92)90022-P

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A method for coating carbon fibres as components of reinforced composites by CO2 laser CVD has been developed. High deposition rates have been obtained in depositing the borides, carbides, nitrides and carbonitrides of titanium even in a widened laser beam. The power density of the irradiation and the partial pressure of the selected precursors strongly influence the deposition rate as well as the structure and properties of the layers. All systems are characterized by a considerable decrease in the deposition rate due to reflectivity enhancement ("self-stop mechanism"). The advantages of the developed method in comparison with thermal CVD are discussed.

引用

页码：78 / 83

页数：6

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