INTERDEPENDENCE OF ELECTRICAL PROPERTIES AND DEFECT STRUCTURE IN HETEROEPITAXIAL GERMANIUM AND SILICON

被引:4
作者
DUMIN, DJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1971年 / 8卷 / 01期
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D O I
10.1116/1.1316293
中图分类号
O59 [应用物理学];
学科分类号
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页码:235 / &
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