CHEMISORPTION OF ATOMIC OXYGEN ON SILICON SURFACE

被引：7

作者：

ELLIALTIOGLU, S

CIRACI, S

机构：

来源：

SOLID STATE COMMUNICATIONS | 1982年 / 42卷 / 12期

关键词：

D O I：

10.1016/0038-1098(82)90231-9

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：879 / 881

页数：3

共 14 条

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