THERMAL-CONDUCTIVITY OF CHEMICALLY VAPOUR-DEPOSITED SI3N4-TIN COMPOSITES

被引：4

作者：

HAYASHI, S

HIRAI, T

机构：

来源：

关键词：

D O I：

10.1007/BF00544150

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3259 / 3264

页数：6

共 19 条

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[5]

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HIRAI, T ;

HAYASHI, S .

[7]

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[8]

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[10]

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