PREPARATION AND SOME PROPERTIES OF CHEMICALLY VAPOUR-DEPOSITED SI3N4-TIN COMPOSITE

被引：76

作者：

HIRAI, T

HAYASHI, S

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1982年 / 17卷 / 05期

关键词：

D O I：

10.1007/BF00752241

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1320 / 1328

页数：9

共 25 条

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