MEMS高g加速度传感器高过载能力的优化研究

Fabrication and measurement of high-g MEMS accelerometer[J]. Shi Yunbo1,Liu Jun1,2,Qi Xiaojin1,Meng Meiyu1 (1 National Key Lab for Electronic Measurement and Technology,North University of China,Taiyuan 030051,China;)2 Department of Mechanical Engineering,University of California,Berkeley.Berkeley,CA,94720,USA).仪器仪表学报. 2008(07)

Fabrication and measurement of high-g MEMS accelerometer[J]. Shi Yunbo1,Liu Jun1,2,Qi Xiaojin1,Meng Meiyu1 (1 National Key Lab for Electronic Measurement and Technology,North University of China,Taiyuan 030051,China;)2 Department of Mechanical Engineering,University of California,Berkeley.Berkeley,CA,94720,USA).仪器仪表学报. 2008(07)