Comparison of GaN and 6H-SiC p-i-n photodetectors with excellent ultraviolet sensitivity and selectivity

被引:27
作者
Torvik, JT [1 ]
Pankove, JI [1 ]
Van Zeghbroeck, BJ [1 ]
机构
[1] Univ Colorado, Dept Elect & Comp Engn, Boulder, CO 80309 USA
基金
美国国家航空航天局;
关键词
gallium nitride; silicon carbide; ultraviolet photodetectors; wide bandgap semiconductors;
D O I
10.1109/16.772472
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We fabricated GaN and 6H-SiC p-i-n photodetectors and compared their electrical and optical characteristics. The GaN diodes suffered from significant leakage current of 37 mu A/mm(2) at -5 V, while the SiC diode leakage current was below the noise level at 10 pA/mm(2) at -20 V, The built-in potentials and the unintentional "i-layer" doping densities were obtained from capacitance-voltage (C-V) measurements. The SiC detectors exhibited a broad spectral response in contrast to the abrupt cutoff observed in the GaN detectors. The peak responsivities of the GaN and SiC photodetectors corresponded to internal quantum efficiencies of 57% at 3.42 eV and 82% at 4.49 eV, respectively. Furthermore, both detectors exhibited excellent visible rejection ratios which is needed for solar-blind applications. The response times at zero bias were 18 and 102 ns for the GaN and SIC detectors, respectively.
引用
收藏
页码:1326 / 1331
页数:6
相关论文
共 20 条
  • [11] NAKAMURA S, 1998, MAT RES SOC B, V23
  • [12] Lateral epitaxy of low defect density GaN layers via organometallic vapor phase epitaxy
    Nam, OH
    Bremser, MD
    Zheleva, TS
    Davis, RF
    [J]. APPLIED PHYSICS LETTERS, 1997, 71 (18) : 2638 - 2640
  • [13] Low noise p-pi-n GaN ultraviolet photodetectors
    Osinsky, A
    Gangopadhyay, S
    Gaska, R
    Williams, B
    Khan, MA
    Kuksenkov, D
    Temkin, H
    [J]. APPLIED PHYSICS LETTERS, 1997, 71 (16) : 2334 - 2336
  • [14] PANKOVE JI, 1998, SEMICONDUCTORS SEMIM, V50
  • [15] Semiconductor ultraviolet detectors
    Razeghi, M
    Rogalski, A
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 79 (10) : 7433 - 7473
  • [16] Sze S. M., 1981, PHYS SEMICONDUCTOR D, P754
  • [17] SZE SM, 1981, PHYS SEMICONDUCTOR D, P79
  • [18] Ultraviolet-sensitive, visible-blind GaN photodiodes fabricated by molecular beam epitaxy
    VanHove, JM
    Hickman, R
    Klaassen, JJ
    Chow, PP
    Ruden, PP
    [J]. APPLIED PHYSICS LETTERS, 1997, 70 (17) : 2282 - 2284
  • [19] VANHOVE JM, 1997, MATER RES SOC S P, V449, P1227
  • [20] High speed, low noise ultraviolet photodetectors based on GaN p-i-n and AlGaN(p)-GaN(i)-GaN(n) structures
    Xu, GY
    Salvador, A
    Kim, W
    Fan, Z
    Lu, C
    Tang, H
    Morkoc, H
    Smith, G
    Estes, M
    Goldenberg, B
    Yang, W
    Krishnankutty, S
    [J]. APPLIED PHYSICS LETTERS, 1997, 71 (15) : 2154 - 2156