Semiconductor ultraviolet detectors

被引:1340
作者
Razeghi, M
Rogalski, A
机构
[1] Institute of Technical Physics, Military University of Technology, 01-489 Warsaw
[2] Center for Quantum Devices, Dept. of Elec. Eng. and Comp. Sci., Northwestern University, Evanston
关键词
D O I
10.1063/1.362677
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this review article a comprehensive analysis of the developments in ultraviolet (UV) detector technology is described. At the beginning, the classification of UV detectors and general requirements imposed on these detectors are presented. Further considerations are restricted to modern semiconductor UV detectors, so the basic theory of photoconductive and photovoltaic detectors is presented in a uniform way convenient for various detector materials. Next, the current state of the art of different types of semiconductor UV detectors is presented. Hitherto, the semiconductor UV detectors have been mainly fabricated using Si. Industries such as the aerospace, automotive, petroleum, and others have continuously provided the impetus pushing the development of fringe technologies which are tolerant of increasingly high temperatures and hostile environments. As a result, the main efforts are currently directed to a new generation of UV detectors fabricated from wide band-gap semiconductors the most promising of which are diamond and AlGaN. The latest progress in development of AlGaN UV detectors is finally described in detail. (C) 1996 American Institute of Physics.
引用
收藏
页码:7433 / 7473
页数:41
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