Effect of tip shape in the design of long distance electrostatic force microscopy

被引:7
作者
Belaidi, S
Girard, P
Leveque, G
机构
[1] Lab. d'Anal. Interfaces N., UPRESA CNRS 5011, 34095 Montpellier Cedex 5, CC 82, Place Eugène Bataillon
来源
MICROELECTRONICS AND RELIABILITY | 1997年 / 37卷 / 10-11期
关键词
D O I
10.1016/S0026-2714(97)00126-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, it is shown that the tip as well as the cantilever (both conducting) act on the electrostatic force. The experimental results on force versus distance agree with the simulations derived from the Equivalent Charge Model. These simulations allow to determine the influence of geometry of the tip and bending of cantilever on the force exerting on the sensor. So, we predict the tip design and operating conditions (detection mode) to achieve the best resolution, particulary in long distance tip-sample in Electrostatic Force Microscopy. (C) 1997 Elsevier Science Ltd.
引用
收藏
页码:1627 / 1630
页数:4
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