Observation of voltage contrast in non-contact resonant mode atomic force microscopy

被引：5

作者：

Girard, P

Solal, GC

Belaidi, S

机构：

[1] Lab. d'Anal. Interfaces Nanophysique, (LAIN) URA CNRS D 1881 Univ. M., F 34095 Montpellier Cedex 5, Place E. Bataillon

来源：

MICROELECTRONIC ENGINEERING | 1996年 / 31卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(95)00344-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we present a new possibility for local voltage detection based on atomic force microscopy (AFM). We use the non contact resonant mode which is sensitive to local force gradients and then those related to electrostatics. The principle is given, experiments illustrate this effect both on metal and on an Integrated Circuit pad buried under insulator. The sensitivity of the method is discussed.

引用

页码：215 / 225

页数：11

共 12 条

[1] BELAIDI S, 1995, UNPUB
[2] ATOMIC FORCE MICROSCOPE
BINNIG, G
QUATE, CF
GERBER, C
[J]. PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 930 - 933
[3] SCANNING-FORCE-MICROSCOPE TEST SYSTEM FOR DEVICE INTERNAL TEST WITH HIGH SPATIAL AND TEMPORAL RESOLUTION
BOHM, C
ROTHS, C
KUBALEK, E
[J]. MICROELECTRONIC ENGINEERING, 1994, 24 (1-4) : 91 - 98
[4] MAGNETIC FORCE MICROSCOPY CURRENT CONTRAST IMAGING - A NEW TECHNIQUE FOR INTERNAL CURRENT PROBING OF ICS
CAMPBELL, AN
COLE, EI
DODD, BA
ANDERSON, RE
[J]. MICROELECTRONIC ENGINEERING, 1994, 24 (1-4) : 11 - 22
[5] PICOSECOND ELECTRICAL SAMPLING USING A SCANNING FORCE MICROSCOPE
HOU, AS
HO, F
BLOOM, DM
[J]. ELECTRONICS LETTERS, 1992, 28 (25) : 2302 - 2303
[6] ELECTROSTATIC FORCES BETWEEN METALLIC TIP AND SEMICONDUCTOR SURFACES
HUDLET, S
SAINTJEAN, M
ROULET, B
BERGER, J
GUTHMANN, C
[J]. JOURNAL OF APPLIED PHYSICS, 1995, 77 (07) : 3308 - 3314
[7] THERMAL IMAGING USING THE ATOMIC FORCE MICROSCOPE
MAJUMDAR, A
CARREJO, JP
LAI, J
[J]. APPLIED PHYSICS LETTERS, 1993, 62 (20) : 2501 - 2503
[8] HIGH-RESOLUTION CAPACITANCE MEASUREMENT AND POTENTIOMETRY BY FORCE MICROSCOPY
MARTIN, Y
ABRAHAM, DW
WICKRAMASINGHE, HK
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (13) : 1103 - 1105
[9] MAGNETIC IMAGING BY FORCE MICROSCOPY WITH 1000-A RESOLUTION
MARTIN, Y
WICKRAMASINGHE, HK
[J]. APPLIED PHYSICS LETTERS, 1987, 50 (20) : 1455 - 1457
[10] ATOMIC FORCE MICROSCOPE FORCE MAPPING AND PROFILING ON A SUB 100-A SCALE
MARTIN, Y
WILLIAMS, CC
WICKRAMASINGHE, HK
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (10) : 4723 - 4729

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