Energetic oxygen particles in the reactive sputtering of Zn targets in Ar/O2 atmospheres

被引：30

作者：

Tominaga, K ^{[1
]}

Murayama, T ^{[1
]}

Sato, Y ^{[1
]}

Mori, I ^{[1
]}

机构：

[1] Dept Univ Tokushima, Tokushima 7708506, Japan

来源：

THIN SOLID FILMS | 1999年 / 343卷

关键词：

energetic oxygen atoms and ions; reactive sputtering; ZnO;

D O I：

10.1016/S0040-6090(98)01579-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Energetic oxygen atoms generated in planar magnetron sputtering was detected by a time-of-flight apparatus which gives information on the energy and the flux of the energetic oxygen atoms. When a Zn target was sputtered in Ar/O-2 gas at 5 mTorr, both the energetic oxygen flux and the degree of oxidation on the Zn target surface increased with increasing oxygen partial pressure. This result indicates that the energetic oxygen atoms and ions are mainly produced by the sputtering of the oxidized ZnO part. (C) 1999 Elsevier Science S.A. Ail rights reserved.

引用

页码：81 / 84

页数：4

共 8 条

[1] SIGNIFICANCE OF NEGATIVE-ION FORMATION IN SPUTTERING AND SIMS ANALYSIS [J].