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ENERGY ANALYSIS OF HIGH-ENERGY NEUTRAL ATOMS IN THE SPUTTERING OF ZNO AND BATIO3

被引：88
作者：
TOMINAGA, K
IWAMURA, S
SHINTANI, Y
TADA, O
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1982年 / 21卷 / 05期
关键词：
D O I：
10.1143/JJAP.21.688
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：688 / 695
页数：8
相关论文
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