HIGH-ENERGY NEUTRAL ATOMS IN THE SPUTTERING OF ZNO

被引：67

作者：

TOMINAGA, K

UESHIBA, N

SHINTANI, Y

TADA, O

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 03期

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D O I：

10.1143/JJAP.20.519

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：519 / 526

页数：8

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