Quantitative microwave evanescent microscopy

被引:49
作者
Gao, C [1 ]
Duewer, F [1 ]
Xiang, XD [1 ]
机构
[1] Lawrence Berkeley Lab, Berkeley, CA 94720 USA
关键词
D O I
10.1063/1.125216
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have developed a scanning evanescent microwave microscope with shielded tip geometry allowing quantitative characterization of the electrical impedance of insulating and conducting materials. By modeling the tip-sample capacitance, quantitative estimates of the sample (both dielectric and conducting) electrical impedance (real and imaginary) and tip-sample separation can be made. Measurements of the tip-sample capacitance versus tip-sample separation have been made and agree with estimated values. Also, the slope of the tip-sample capacitance with respect to the tip-sample distance is calculated to implement tip-sample distance regulation for dielectric materials. (C) 1999 American Institute of Physics. [S0003-6951(99)04245-X].
引用
收藏
页码:3005 / 3007
页数:3
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