ELASTIC SILICON-FILM-BASED NANOSHELLS: FORMATION, PROPERTIES, AND APPLICATIONS

被引：32

作者：

Prinz, V. Ya. ^{[1
]}

Golod, S. V. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Semicond Phys, Siberian Div, Novosibirsk 630090, Russia

来源：

JOURNAL OF APPLIED MECHANICS AND TECHNICAL PHYSICS | 2006年 / 47卷 / 06期

基金：

瑞士国家科学基金会; 俄罗斯基础研究基金会;

关键词：

elastic stresses and strain; thin films; silicon; nanotechnology;

D O I：

10.1007/s10808-006-0126-9

中图分类号：

O3 [力学];

学科分类号：

08 ; 0801 ;

摘要：

Controllable formation and properties of solid single-crystal micro-and nanoshells of various shapes (tubes and spirals, vertically positioned rings and cylinders, and bent and trough-shaped cantilevers) are briefly reviewed, and new results are given. The shells and complicated structures of prescribed size and shape are formed with the use of elastic energy of initial strained SiGe/Si films of nanometer thickness and methods of highly selective and directed detachment of the films from the silicon substrates. It is experimentally demonstrated that the diameters of the fabricated SiGe/Si nanotubes are several times smaller than the values predicted by the continuum elasticity theory. The properties of the shells made of semiconductor and hybrid (metal semiconductor and metal dielectric semiconductor) films and their applications in micro-and nanoscale electrical engineering are discussed.

引用

页码：867 / 878

页数：12

共 47 条

[1]

[Anonymous], 2004, NANOELECTRONICS NANO

[2] Contacting carbon nanotubes selectively with low-ohmic contacts for four-probe electric measurements [J].

Bachtold, A ;

Henny, M ;

Terrier, C ;

Strunk, C ;

Schonenberger, C ;

Salvetat, JP ;

Bonard, JM ;

Forro, L .

APPLIED PHYSICS LETTERS, 1998, 73 (02) :274-276

[3] InGaAs/GaAs nanotubes simulation: Comparison between continual and molecular dynamics approaches [J].

Bolesta, AV ;

Golovnev, IF ;

Fomin, VM .

COMPUTATIONAL MATERIALS SCIENCE, 2006, 36 (1-2) :147-151

[4]

Brushan B., 2004, HDB NANOTECHNOLOGY

[5]

CAMPBELL SA, 1998, SEMICONDUCTOR MICROM, V2

[6] Self-forming silicide/SiGe-based tube structure on Si(001) substrates [J].

Chen, HC ;

Liao, KF ;

Lee, SW ;

Chen, LJ .

THIN SOLID FILMS, 2004, 469 :483-486

[7] Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor [J].

Chen, JH ;

Zou, J ;

Liu, C ;

Schutt-Ainé, JE ;

Kang, SM .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 2003, 50 (03) :730-739

[8] Nanotechnology - Pretty as you please, curling films turn themselves into nanodevices [J].

Cho, Adrian .

SCIENCE, 2006, 313 (5784) :164-165

[9] Radial superlattices and single nanoreactors [J].

Deneke, C ;

Jin-Phillipp, NY ;

Loa, I ;

Schmidt, OG .

APPLIED PHYSICS LETTERS, 2004, 84 (22) :4475-4477

[10] Hot-tube probes of thermal anemometers with high spatial and temporal resolution [J].

Fomin, V. M. ;

Shiplyuk, A. N. ;

Aniskin, V. M. ;

Maslov, A. A. ;

Pai, V. V. ;

Prinz, V. Ya. ;

Seleznev, V. A. .

DOKLADY PHYSICS, 2006, 51 (03) :132-135

← 1 2 3 4 5 →