Combinatorial approach to the fabrication of organic thin films

被引：10

作者：

Itaka, K ^{[1
]}

Yamashiro, M

Yamaguchi, J

Yaginuma, S

Haemori, M

Koinuma, H

机构：

[1] Tokyo Inst Technol, Mat & Struct Lab, Tokyo 152, Japan

[2] Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan

[3] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050044, Japan

来源：

APPLIED SURFACE SCIENCE | 2006年 / 252卷 / 07期

关键词：

combinatorial technology; organic; pentacene; thin films; atomic force microscope; buffer layers; rubrene; initial growth; molecular beam epitaxy;

D O I：

10.1016/j.apsusc.2005.06.038

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We demonstrate combinatorial approach in investigation of organic thin film fabrication. "Combinatorial substrate screening", which is the deposition onto several kinds of substrates simultaneously, is useful to choose suitable substrate for organic thin film growth. "Combinatorial thickness-gradient films" can be fabricated using a moving mask which travels from an edge to another edge of substrate continuously during the deposition. The combinatorial thickness-gradient film can be regarded as the library for time evolution of film growth during the deposition. This mapping can serve as a powerful method for the research of growth of thin film in an initial stage. Besides, combinatorial thickness-gradient film can be utilized for the examination of a buffer layer effect. These techniques enable us to quickly optimize for the fabrication of high-quality organic thin films. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：2562 / 2567

页数：6

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