Monolithic integration of microfluidic channels and optical waveguides in silica on silicon

被引:71
作者
Friis, P
Hoppe, K
Leistiko, O
Mogensen, KB
Hübner, J
Kutter, JP
机构
[1] Tech Univ Denmark, Mikroelekt Centret, DK-2800 Lyngby, Denmark
[2] GIGA ApS, DK-2740 Skovlund, Denmark
[3] IOS, DK-2950 Vedbaek, Denmark
[4] Tech Univ Denmark, Mikroelekt Centret, DK-2800 Lyngby, Denmark
[5] Tech Univ Denmark, Res Ctr COM, DK-2800 Lyngby, Denmark
关键词
D O I
10.1364/AO.40.006246
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Sealing of the flow channel is an important aspect during integration of microfluidic channels and optical waveguides. The uneven topography of many waveguide-fabrication techniques will lead to leakage of the fluid channels. Planarization methods such as chemical mechanical polishing or the etch-back technique are possible, but troublesome. We present a simple but efficient alternative: By means of changing the waveguide layout, bonding pads are formed along the microfluidic channels. With the same height as the waveguide, they effectively prevent leakage and hermetically seal the channels during bonding. Negligible influence on light propagation is found when 10-mum-wide bonding pads are used. Fabricated microsystems with application in absorbance measurements and flow cytometry are presented. (C) 2001 Optical Society of America.
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页码:6246 / 6251
页数:6
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