Dislocation-free island formation in heteroepitaxial growth: A study at equilibrium

被引:299
作者
Daruka, I
Barabasi, AL
机构
[1] Department of Physics, University of Notre Dame, Notre Dame, IN
关键词
D O I
10.1103/PhysRevLett.79.3708
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We investigate the equilibrium properties of strained heteroepitaxial systems, incorporating the formation and the growth of a wetting film, dislocation-free island formation, and ripening. The derived phase diagram provides a detailed characterization of the possible growth modes in terms of the island density, equilibrium island size, and wetting layer thickness. Comparing our predictions with experimental results we discuss the growth conditions that can lead to stable islands as well as ripening. [S0031-9007(97)04531-6].
引用
收藏
页码:3708 / 3711
页数:4
相关论文
共 19 条
  • [1] ABARABASI AL, 1997, APPL PHYS LETT, V70, P2565
  • [2] Growth and characterization of self-assembled Ge-rich islands on Si
    Abstreiter, G
    Schittenhelm, P
    Engel, C
    Silveira, E
    Zrenner, A
    Meertens, D
    Jager, W
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1996, 11 (11) : 1521 - 1528
  • [3] Island formation and critical thickness in heteroepitaxy
    Daruka, I
    Barabasi, AL
    [J]. PHYSICAL REVIEW LETTERS, 1997, 78 (15) : 3027 - 3027
  • [4] GERARD JM, 1995, CONFINED ELECT PHOTO
  • [5] Morphological evolution of strained films by cooperative nucleation
    Jesson, DE
    Chen, KM
    Pennycook, SJ
    Thundat, T
    Warmack, RJ
    [J]. PHYSICAL REVIEW LETTERS, 1996, 77 (07) : 1330 - 1333
  • [6] Deposition of three-dimensional Ge islands on Si(001) by chemical vapor deposition at atmospheric and reduced pressures
    Kamins, TI
    Carr, EC
    Williams, RS
    Rosner, SJ
    [J]. JOURNAL OF APPLIED PHYSICS, 1997, 81 (01) : 211 - 219
  • [7] In situ, atomic force microscope studies of the evolution of InAs three-dimensional islands on GaAs(001)
    Kobayashi, NP
    Ramachandran, TR
    Chen, P
    Madhukar, A
    [J]. APPLIED PHYSICS LETTERS, 1996, 68 (23) : 3299 - 3301
  • [8] Landau LD, 1986, THEORY ELASTICITY
  • [9] CRITICAL LAYER THICKNESS FOR SELF-ASSEMBLED INAS ISLANDS ON GAAS
    LEONARD, D
    POND, K
    PETROFF, PM
    [J]. PHYSICAL REVIEW B, 1994, 50 (16): : 11687 - 11692
  • [10] MARCHENKO VI, 1981, SOV PHYS JETP, V54, P605