共 23 条
[1]
ARMANI D, 1998, 12 INT C MEMS MEMS 9
[4]
pH-sensitive thin hydrogel microfabricated by photolithography
[J].
LANGMUIR,
1998, 14 (22)
:6610-6612
[5]
COOK RD, 1994, ADV MECH MAT
[10]
Kovacs G.T., 1998, Micromachined Transducers Sourcebook