Elecctrooptical properties of heterostructure (Pb, La)(Zr,Ti)O3 waveguides on Nb-SrTiO3

被引：36

作者：

Nashimoto, K ^{[1
]}

Nakamura, S ^{[1
]}

Morikawa, T ^{[1
]}

Moriyama, H ^{[1
]}

Watanabe, M ^{[1
]}

Osakabe, E ^{[1
]}

机构：

[1] Fuji Xerox Co Ltd, Corp Res Labs, Kanagawa 2590157, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 9B期

关键词：

PLZT; PZT; thin film; epitaxial; heterostructure; Nb-doped SrTiO3; optical waveguide; electrooptic deflector;

D O I：

10.1143/JJAP.38.5641

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The electrooptic behavior of (Pb, La)(Zr, Ti)O-3 (PLZT) heterostructure waveguides, including PLZT/Pb(Zr0.95Ti0.005)O-3 [PZT (95/5)] and Pb(Zr0.52Ti0.48)O-3 [PZT (52/48)]/Pb(Zr0.85Ti0.15)O-3 [PZT (85/15)] on Nb-ST substrates was examined. Electrooptic behavior was characterized by fabricating beam deflectors using these heterostructures. The heterostructure waveguides exhibited hysteresis-free electrooptic behavior after the application of initial voltage. The electrooptic behavior of PLZT/PZT (95/5) and PZT (52/48)/PZT (85/15) heterostructure waveguides presented a nonlinear dependence and a linear dependence, respectively. Th apparent electrooptic coefficient of the PLZT/PZT (95/5) heterostructure obtained from the linear part of the V-theta characteristic above +7.5 V was 53 pm/V, and that of the PZT (52/48)/PZT (85/15) heterostructure was 37 pm/V. The electrooptic coefficient of the PZT (52/48) waveguide layer using an effective voltage was estimated to be 53 pm/V.

引用

页码：5641 / 5645

页数：5

共 12 条

[1] Asymmetric ferroelectricity and anomalous current conduction in heteroepitaxial BaTiO3 thin films [J].

Abe, K ;

Komatsu, S ;

Yanase, N ;

Sano, K ;

Kawakubo, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (9B) :5846-5853

[2] ELECTROOPTIC EFFECTS OF (PB, LA)(ZR, TI)O3 THIN-FILMS PREPARED BY RF PLANAR MAGNETRON SPUTTERING [J].

ADACHI, H ;

KAWAGUCHI, T ;

SETSUNE, K ;

OHJI, K ;

WASA, K .

APPLIED PHYSICS LETTERS, 1983, 42 (10) :867-868

[3] LINEAR ELECTROOPTIC RESPONSE IN SOL-GEL PZT PLANAR WAVE-GUIDES [J].

BUSCH, JR ;

RAMAMURTHI, SD ;

SWARTZ, SL ;

WOOD, VE .

ELECTRONICS LETTERS, 1992, 28 (17) :1591-1592

[4] Thin-film channel waveguide electro-optic modulator in epitaxial BaTiO3 [J].

Gill, DM ;

Conrad, CW ;

Ford, G ;

Wessels, BW ;

Ho, ST .

APPLIED PHYSICS LETTERS, 1997, 71 (13) :1783-1785

[5]

HAERTLING GH, 1971, J AM CERAM SOC, V54, P1, DOI [10.1111/j.1151-2916.1971.tb12296.x, 10.1111/j.1151-2916.1970.tb12105.x-i1]

[6] Control of crystallinity in sol-gel derived epitaxial LiNbO3 thin films on sapphire [J].

Nashimoto, K ;

Moriyama, H ;

Osakabe, E .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (9B) :4936-4940

[7] Fabrication of electro-optic Pb(Zr, Ti)O3 heterostructure waveguides on Nb-doped SrTiO3 by solid-phase epitaxy [J].

Nashimoto, K ;

Nakamura, S ;

Morikawa, T ;

Moriyama, H ;

Watanabe, M ;

Osakabe, E .

APPLIED PHYSICS LETTERS, 1999, 74 (19) :2761-2763

[8] METAL ALKOXIDE SOLUTION-DERIVED EPITAXIAL LEAD TITANATE-BASED THIN-FILM OPTICAL WAVE-GUIDES [J].

NASHIMOTO, K ;

NAKAMURA, S ;

MORIYAMA, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (9B) :5091-5095

[9] Electro-optic beam deflector using epitaxial Pb(Zr,Ti)O3 waveguides on Nb-doped SrTiO3 [J].

Nashimoto, K ;

Nakamura, S ;

Moriyama, H ;

Watanabe, M ;

Osakabe, E .

APPLIED PHYSICS LETTERS, 1998, 73 (03) :303-305

[10] ELECTROOPTICAL CHARACTERIZATION OF PB(ZR,TI)O3 THIN-FILMS BY WAVE-GUIDE REFRACTOMETRY [J].

POTTER, BG ;

SINCLAIR, MB ;

DIMOS, D .

APPLIED PHYSICS LETTERS, 1993, 63 (16) :2180-2182

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