METAL ALKOXIDE SOLUTION-DERIVED EPITAXIAL LEAD TITANATE-BASED THIN-FILM OPTICAL WAVE-GUIDES

被引:32
作者
NASHIMOTO, K
NAKAMURA, S
MORIYAMA, H
机构
[1] Materials Research Laboratory, Fuji Xerox Co Ltd, Minamiashigara, Kanagawa, 250-01
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 9B期
关键词
PBTIO3; PLT; PZT; THIN FILM; SOL-GEL; EPITAXY; OPTICAL WAVE-GUIDE;
D O I
10.1143/JJAP.34.5091
中图分类号
O59 [应用物理学];
学科分类号
摘要
Lead titanate-based thin films were prepared for optical waveguide studies by nonhydrolyzed methoxyethoxide-solution-derived solid-phase epitaxy. PbTiO3 thin films crystallized with preferred (001) and (100) orientations on SrTiO3 (100) and MgO (100), respectively. PLT (28/100) thin films had obvious grain structure although they crystallized with a single (110) orientation on sapphire (<(0112)over bar>) substrates. Epitaxial PZT thin films with a single (100) orientation crystallized on MgO (100) also had obvious grain structure. Epitaxial PZT (52/48) thin films on SrTiO3 (100) had a single (001) orientation, rocking curve full width at half-maximum of around 0.1 degrees, and smooth surface of rms roughness less than 2 nm. The epitaxial PZT thin films on SrTiO3 showed optical propagation loss as small as 8 dB/cm at 633 nm.
引用
收藏
页码:5091 / 5095
页数:5
相关论文
共 20 条
[1]  
Adachi H., 1983, Japanese Journal of Applied Physics, Supplement, V22, P11
[2]   OBSERVATION OF SOL-GEL SOLID-PHASE EPITAXIAL-GROWTH OF FERROELECTRIC PB(NB,ZR,TI)O3 THIN-FILMS ON SAPPHIRE [J].
BARLINGAY, CK ;
DEY, SK .
APPLIED PHYSICS LETTERS, 1992, 61 (11) :1278-1280
[3]  
Budd K. D., 1985, British Ceramic Proceedings, P107
[4]   SYNTHESIS AND MICROSTRUCTURE OF HIGHLY ORIENTED LEAD TITANATE THIN-FILMS PREPARED BY A SOL-GEL METHOD [J].
CHEN, CH ;
RYDER, DF ;
SPURGEON, WA .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1989, 72 (08) :1495-1498
[5]   EPITAXIAL PBTIO3 THIN-FILMS GROWN BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION [J].
DEKEIJSER, M ;
DORMANS, GJM ;
CILLESSEN, JFM ;
DELEEUW, DM ;
ZANDBERGEN, HW .
APPLIED PHYSICS LETTERS, 1991, 58 (23) :2636-2638
[6]  
FORK DK, UNPUB
[7]  
Higashino H., 1985, Japanese Journal of Applied Physics, Supplement, V24, P284
[8]   EPITAXIAL-GROWTH OF FERROELECTRIC PLZT [(PB,LA)(ZR,TI)O3] THIN-FILMS [J].
ISHIDA, M ;
TSUJI, S ;
KIMURA, K ;
MATSUNAMI, H ;
TANAKA, T .
JOURNAL OF CRYSTAL GROWTH, 1978, 45 (01) :393-398
[9]   PREPARATION AND CHARACTERIZATION OF SOL-GEL DERIVED EPITAXIAL AND ORIENTED PB(ZR0.52TI0.48)O-3 THIN-FILMS [J].
NASHIMOTO, K ;
NAKAMURA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9B) :5147-5150
[10]   EPITAXIAL LINBO3 THIN-FILMS PREPARED BY A SOL-GEL PROCESS [J].
NASHIMOTO, K ;
CIMA, MJ .
MATERIALS LETTERS, 1991, 10 (7-8) :348-354