Electro-optic beam deflector using epitaxial Pb(Zr,Ti)O3 waveguides on Nb-doped SrTiO3

被引：37

作者：

Nashimoto, K ^{[1
]}

Nakamura, S ^{[1
]}

Moriyama, H ^{[1
]}

Watanabe, M ^{[1
]}

Osakabe, E ^{[1
]}

机构：

[1] Fuji Xerox Co Ltd, Opt Devices Lab, Kanagawa 25901, Japan

来源：

APPLIED PHYSICS LETTERS | 1998年 / 73卷 / 03期

关键词：

D O I：

10.1063/1.121816

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Pb(Zr,Ti)O-3 (PZT) thin-film optical waveguides were grown on Nb-doped SrTiO3 substrates by solid-phase epitaxy to fabricate an electrode/waveguide/conductor structure. The propagation loss was relatively large for a PZT waveguide on a lightly Nb-doped SrTiO3 as compared with the propagation loss of 4 dB/cm for the structure using undoped SrTiO3. An electro-optic beam deflection device was fabricated by preparing a prism electrode on the surface of the PZT waveguide on a lightly Nb-doped SrTiO3 substrate. Efficient defection of the coupled laser beam in the PZT waveguide as large as 11 mrad was observed by applying 35 V between the prism electrode and the substrate. (C) 1998 American Institute of Physics.

引用

页码：303 / 305

页数：3

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