Bias voltage dependence of properties for depositing transparent conducting ITO films on flexible substrate

被引：63

作者：

Yang, ZW ^{[1
]}

Han, SH

Yang, TL

Ye, LN

Zhang, DH

Ma, HL

Cheng, CF

机构：

[1] Shandong Univ, Inst Optoelect Mat & Devices, Jinan 250100, Peoples R China

[2] Shandong Univ, Dept Phys, Jinan 250100, Peoples R China

[3] Shandong Normal Univ, Jinan 250014, Peoples R China

来源：

THIN SOLID FILMS | 2000年 / 366卷 / 1-2期

关键词：

indium tin oxide; sputtering; conductivity; optical properties;

D O I：

10.1016/S0040-6090(00)00919-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Good transparent conducting indium tin oxide films with good adherence were deposited on water-cooled polypropylene adipate substrate using bias r.f. magnetron sputtering. The films with resistivity as low as 6.3 X 10(-4) Omega cm and transmittance over 80% have been obtained by adjusting the bias voltage. It was observed that the structural, electrical and optical properties of the films depend on the bias voltage applied to substrate table. (C) 2000 Published by Elsevier Science S.A. All rights reserved.

引用

页码：4 / 7

页数：4

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