Activation energy in metal-containing DLC films with various metals of various concentrations

被引：18

作者：

Takeno, Takanori ^{[1
,2
]}

Hoshi, Yuhtaro ^{[3
]}

Miki, Hiroyuki ^{[1
]}

Takagi, Toshiyuki ^{[1
]}

机构：

[1] Tohoku Univ, Inst Fluid Sci, Aoba Ku, Sendai, Miyagi 9808577, Japan

[2] Tohoku Univ, Int Adv Res & Educ Org, Inst Int Adv Interdisciplinary Res, Aoba Ku, Sendai, Miyagi 9808578, Japan

[3] Tohoku Univ, Grad Sch Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan

来源：

关键词：

activation energy; DLC; metal;

D O I：

10.1016/j.diamond.2008.03.039

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The activation energy of (Co, Mo, W)-containing diamond-like carbon (DLC) films with different metal concentrations was investigated. The films were deposited onto silicon substrates by radio frequency discharged methane plasma and a co-sputtering of the metal target. The structure of the films was analyzed by Raman spectroscopy and using a transmission electron microscope. The results indicated that crystalline metal clusters are dispersed in amorphous carbon insulating matrix, and hence the metal-containing DLC films investigated can be classified as granular films. The temperature dependence of the resistance was also measured. From the temperature dependence, the activation energy was calculated numerically using (sigma=sigma(0)exp(-E/kT). The calculated activation energy rapidly decreases as the metal concentration increases. This is because of the increase in the average size of the metal clusters. A detailed discussion is presented in terms of the radius of the metal clusters inside the films. (c) 2008 Elsevier B.V. All rights reserved.

引用

页码：1669 / 1673

页数：5

共 24 条

[1]

ABELES B, 1975, ADV PHYS, V24, P407, DOI 10.1080/00018737500101431

[2] Electron transport in W-containing amorphous carbon-silicon diamond-like nanocomposites [J].

Bozhko, A ;

Takagi, T ;

Takeno, T ;

Shupegin, M .

JOURNAL OF PHYSICS-CONDENSED MATTER, 2004, 16 (46) :8447-8458

[3] Electron transport in amorphous carbon-silicon nanocomposites containing Nb [J].

Bozhko, A ;

Takagi, T ;

Takeno, T ;

Shupegin, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (11A) :7566-7571

[4] Raman spectroscopy of hydrogenated amorphous carbons [J].

Casiraghi, C ;

Ferrari, AC ;

Robertson, J .

PHYSICAL REVIEW B, 2005, 72 (08)

[5] Nature of disorder and localization in amorphous carbon [J].

Chen, CW ;

Robertson, J .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1998, 227 :602-606

[6] Structure of diamond-like carbon films containing transition metals deposited by reactive magnetron sputtering [J].

Corbella, C ;

Oncins, G ;

Gómez, MA ;

Polo, MC ;

Pascual, E ;

García-Céspedes, J ;

Andújar, JL ;

Bertran, E .

[7] ELECTRICAL-CONDUCTIVITY OF AMORPHOUS-CARBON AND AMORPHOUS HYDROGENATED CARBON [J].

DASGUPTA, D ;

DEMICHELIS, F ;

TAGLIAFERRO, A .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1991, 63 (06) :1255-1266

[8] Interpretation of Raman spectra of disordered and amorphous carbon [J].

Ferrari, AC ;

Robertson, J .

PHYSICAL REVIEW B, 2000, 61 (20) :14095-14107

[9]

Godet C, 2002, PHYS STATUS SOLIDI B, V231, P499, DOI 10.1002/1521-3951(200206)231:2<499::AID-PSSB499>3.0.CO

[10]

2-K

← 1 2 3 →