A nanoelectronic nose: a hybrid nanowire/carbon nanotube sensor array with integrated micromachined hotplates for sensitive gas discrimination

被引：59

作者：

Chen, Po-Chiang ^{[1
]}

Ishikawa, Fumiaki N. ^{[1
]}

Chang, Hsiao-Kang ^{[1
]}

Ryu, Koungmin ^{[1
]}

Zhou, Chongwu ^{[1
]}

机构：

[1] Univ So Calif, Ming Hsieh Dept Elect Engn, Los Angeles, CA 90089 USA

来源：

NANOTECHNOLOGY | 2009年 / 20卷 / 12期

基金：

美国国家科学基金会;

关键词：

IN2O3; NANOWIRES; ELECTRONIC NOSE; OXIDE NANOWIRE; SELECTIVE DETECTION; CARBON NANOTUBES; SURFACE; PERFORMANCE; HYDROGEN; MODEL; NO2;

D O I：

10.1088/0957-4484/20/12/125503

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A novel hybrid chemical sensor array composed of individual In2O3 nanowires, SnO2 nanowires, ZnO nanowires, and single-walled carbon nanotubes with integrated micromachined hotplates for sensitive gas discrimination was demonstrated. Key features of our approach include the integration of nanowire and carbon nanotube sensors, precise control of the sensor temperature using the micromachined hotplates, and the use of principal component analysis for pattern recognition. This sensor array was exposed to important industrial gases such as hydrogen, ethanol and nitrogen dioxide at different concentrations and sensing temperatures, and an excellent selectivity was obtained to build up an interesting 'smell-print' library of these gases. Principal component analysis of the sensing results showed great discrimination of those three tested chemicals, and in-depth analysis revealed clear improvement of selectivity by the integration of carbon nanotube sensors. This nanoelectronic nose approach has great potential for detecting and discriminating between a wide variety of gases, including explosive ones and nerve agents.

引用

页数：8

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