Electric force microscopy with a single carbon nanotube tip

被引：7

作者：

Dagata, JA ^{[1
]}

Chien, FSS ^{[1
]}

Gwo, S ^{[1
]}

Morimoto, K ^{[1
]}

Inoue, T ^{[1
]}

Itoh, J ^{[1
]}

Yokoyama, H ^{[1
]}

机构：

[1] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA

来源：

METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XV | 2001年 / 4344卷

关键词：

scanned probe microscopy; lithography; electric force microscopy; carbon nanotube; silicon-on-insulator;

D O I：

10.1117/12.436728

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Carbon nanotube tips offer a significant improvement over standard scanned probe microscope (SPM) tips for electrical characterization of nanodevice structures. Carbon nanotube tips are compatible with requirements for integrated SPM-probe station instruments in which SPM-based lithography, topography, electric force microscopy, and traditional current-voltage measurements are performed simultaneously or sequentially. As device dimensions shrink, traditional diagnostics will be unable to probe nanometer-scale phenomena that affect device performance and reliability. At the same time, the introduction of novel materials such as silicon-on-insulator into standard processing will require methods that can rapidly identify defects and their local behavior. Electric force microscopy with carbon nanotube tips offers unique capabilities for satisfying these needs.

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收藏

页码：58 / 71

页数：14

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