Structures of AlN/VN superlattices with different AlN layer thicknesses

被引：39

作者：

Li, Q ^{[1
]}

Kim, IW

Barnett, SA

Marks, LD

机构：

[1] Chinese Univ Hong Kong, Dept Phys, Shatin, Hong Kong, Peoples R China

[2] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA

来源：

JOURNAL OF MATERIALS RESEARCH | 2002年 / 17卷 / 05期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1557/JMR.2002.0181

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

AIN/VN superlattices with different periods were studied using x-ray diffraction and transmission electron microscopy (TEM). A phase trans format ion of the AIN from an epitaxially stabilized rock-salt structure to a hexagonal wurtzite structure was observed for an AIN layer thickness greater than 4 rim. A structural model is proposed on the basis of TEM results for the orientation of the transformed phase. The VN layer grown on top of the hexagonal AIN was observed to be reoriented compared to that in the stabilized B1-AIN/VN. The VN nucleated by taking the w-AIN(002) plane as its (111) plane instead of the (002) plane.

引用

页码：1224 / 1231

页数：8

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